NEW LITERATURE ANNOUNCEMENT

Title:                Hazardous Gas Monitoring Throughout the Semiconductor Manufacturing Facility

Summary:        Semiconductor manufacturing facilities employ a number of hazardous gases in their production processes. Whenever these gases are stored, distributed or used in manufacturing processes, there exists the potential for a hazardous condition. The primary hazards associated with these gases include fire, explosion, and contamination resulting in product loss or unscheduled preventative maintenance. These gases must be continuously monitored to ensure the health and safety of employees, to protect property, as well as to maintain regulatory compliance.

Reliable gas detection and monitoring systems are an essential element of the semiconductor plant’s safety system. A variety of systems are available for different monitoring applications. Using the correct system will result in managing gas hazards in the most effective and efficient way. Hazardous gas monitoring systems benefit the semiconductor industry in the following applications:

§          Parts per million detection in ventilated gas cabinets, enclosures, process equipment chases and clean rooms

§          Flammability monitoring of LFL (Lower Flammable Limit)/ LEL (Lower Explosive Limit) levels in and around process tools

§          Area monitoring for toxics and combustibles in storage areas, distribution, delivery piping and equipment chases

Monitoring within the semiconductor plant requires gas detection systems that can accommodate a variety of combustible and toxic gas applications with both single and multi-sensor network solutions. The SmartMaxII gas detection system is excellent for both large & small gas detection applications. It is designed to work with Control Instruments’ catalytic and electrochemical sensors for LFL/LEL and PPM monitoring. Each SmartMaxII system can continuously monitor and control the readings from as many as four same-type sensors.

Available:         To receive a free copy contact: Control Instruments Corporation, 25 Law Drive, Fairfield, New Jersey 07004. T: 973.575.9114, F: 973.575.0013