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Semiconductor manufacturing
facilities employ a number of hazardous gases in their production
processes. Whenever these gases are stored, distributed or used in
manufacturing processes, there exists the potential for a hazardous
condition. The primary hazards associated with these gases include
fire, explosion, and contamination resulting in product loss or
unscheduled preventative maintenance. These gases must be
continuously monitored to ensure the health and safety of employees,
to protect property, as well as to maintain regulatory compliance.
Continuous gas monitoring in semiconductor facilities is a
requirement of local and state regulations.
Monitoring within the semiconductor
plant requires gas detection systems that can accommodate a variety
of combustible and toxic gas applications with both single and
multi-sensor network solutions. The SmartMaxII gas detection system
is excellent for both large and small gas detection applications. It
is designed to work with Control Instruments catalytic and
electrochemical sensors for LFL/LEL and PPM monitoring
Examples of semiconductor applications including: Parts per million detection in
ventilated gas cabinets, enclosures, process
equipment chases and clean rooms, flammability monitoring of LFL/LEL
levels in and around process tools, and area monitoring for toxics and
combustibles in storage areas, distribution,
delivery piping and equipment chases |
Required