Semiconductor manufacturing facilities employ a number of hazardous gases in their production processes. Whenever these gases are stored, distributed or used in manufacturing processes, there exists the potential for a hazardous condition. The primary hazards associated with these gases include fire, explosion, and contamination resulting in product loss or unscheduled preventative maintenance. These gases must be continuously monitored to ensure the health and safety of employees, to protect property, as well as to maintain regulatory compliance. Continuous gas monitoring in semiconductor facilities is a requirement of local and state regulations.
Monitoring within the semiconductor plant requires gas detection systems that can accommodate a variety of combustible and toxic gas applications with both single and multi-sensor network solutions. The SmartMaxII gas detection system is excellent for both large and small gas detection applications. It is designed to work with Control Instruments’ catalytic and electrochemical sensors for LFL/LEL and PPM monitoring.
Examples of semiconductor applications include:
- Parts per million detection in ventilated gas cabinets, enclosures, process equipment chases and clean rooms,
- Flammability monitoring of LFL/LEL levels in and around process tools, and
- Area monitoring for toxics and combustibles in storage areas, distribution, delivery piping and equipment chases
- Hydrogen monitoring of CVD process tools