Parts Per Million Detection in Semiconductor Facilities
Containers of hazardous gases, both flammable and toxic, are often isolated from the surrounding environment by safety enclosures (gas cabinets). Some process tools have a gas control enclosure section that serves the same purpose as a gas cabinet. It is important to monitor these enclosures for leaking gas to save product as well as prevent a toxic condition. The cabinets and enclosures are ventilated to prevent the buildup of any leaking gas.